Detecting multi-layer layout hotspots with adaptive squish patterns-Reference-Cited by-同舟云学术

Detecting multi-layer layout hotspots with adaptive squish patterns

Published:2019-01-21 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the 24th Asia and South Pacific Design Automation Conference
language:
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Author:

Yang Haoyu¹,Pathak Piyush²,Gennari Frank²,Lai Ya-Chieh²,Yu Bei¹

Affiliation:

1. CUHK

2. Cadence Design Systems Inc.

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3287624.3288747

Reference25 articles.

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2. A Fuzzy-Matching Model With Grid Reduction for Lithography Hotspot Detection

3. K.-J. Chen Y.-K. Chuang B.-Y. Yu and S.-Y. Fang "Minimizing cluster number with clip shifting in hotspot pattern classification " in ACM/IEEE Design Automation Conference (DAC) 2017 pp. 63:1--63:6. 10.1145/3061639.3062283 K.-J. Chen Y.-K. Chuang B.-Y. Yu and S.-Y. Fang "Minimizing cluster number with clip shifting in hotspot pattern classification " in ACM/IEEE Design Automation Conference (DAC) 2017 pp. 63:1--63:6. 10.1145/3061639.3062283

4. B. Yu D. Z. Pan T. Matsunawa and X. Zeng "Machine learning and pattern matching in physical design " in IEEE/ACM Asia and South Pacific Design Automation Conference (ASPDAC) 2015 pp. 286--293. B. Yu D. Z. Pan T. Matsunawa and X. Zeng "Machine learning and pattern matching in physical design " in IEEE/ACM Asia and South Pacific Design Automation Conference (ASPDAC) 2015 pp. 286--293.

5. Accurate lithography hotspot detection based on principal component analysis-support vector machine classifier with hierarchical data clustering

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