Cell-Based Design Methods for Directed Self-Assembly
Author:
Affiliation:
1. Massachusetts Institute of Technology, Cambridge, MA, USA
Funder
Taiwan Semiconductor Manufacturing Company
National Science Foundation
Publisher
ACM
Link
https://dl.acm.org/doi/pdf/10.1145/2872334.2893445
Reference2 articles.
1. Complex self-assembled patterns using sparse commensurate templates with locally varying motifs
2. Templating three-dimensional self-assembled structures in bilayer block copolymer films;Tavakkoli A. K. G.;Science
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1. DSA-Compliant Routing for 2-D Patterns Using Block Copolymer Lithography;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2019-02
2. Detailed Placement for Two-Dimensional Directed Self-Assembly Technology;Proceedings of the 54th Annual Design Automation Conference 2017;2017-06-18
3. DSA-compliant routing for two-dimensional patterns using block copolymer lithography;Proceedings of the 35th International Conference on Computer-Aided Design;2016-11-07
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