Detailed Placement for Two-Dimensional Directed Self-Assembly Technology-Reference-Cited by-同舟云学术

Detailed Placement for Two-Dimensional Directed Self-Assembly Technology

Published:2017-06-18 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the 54th Annual Design Automation Conference 2017
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Author:

Lin Zhi-Wen¹,Chang Yao-Wen²

Affiliation:

1. Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan

2. Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan and Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3061639.3062229

Reference28 articles.

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2. K. K. Berggren C. A. Ross H.-W. Do J.-B. Chang and H.-K. Cho "Cell-based design methods for directed self-assembly " in Proc. of ISPD pp. 37 2016. 10.1145/2872334.2893445 K. K. Berggren C. A. Ross H.-W. Do J.-B. Chang and H.-K. Cho "Cell-based design methods for directed self-assembly " in Proc. of ISPD pp. 37 2016. 10.1145/2872334.2893445

3. Y. Borodovsky "Complementary lithography at insertion and beyond " in Semicon West 2012. Y. Borodovsky "Complementary lithography at insertion and beyond " in Semicon West 2012.

4. U. Brenner and J. Vygen "Faster optimal single-row placement with fixed ordering " in Proc. of DATE pp. 117--121 2000. 10.1145/343647.343716 U. Brenner and J. Vygen "Faster optimal single-row placement with fixed ordering " in Proc. of DATE pp. 117--121 2000. 10.1145/343647.343716

5. J.-B. Chang H.-K. Choi A. F. Hannon A. Alexander-Katz C. A. Ross and K. K. Berggren "Design rules for self-assembled block copolymer patterns using tiled templates " Nature Communications no. 5 2014. J.-B. Chang H.-K. Choi A. F. Hannon A. Alexander-Katz C. A. Ross and K. K. Berggren "Design rules for self-assembled block copolymer patterns using tiled templates " Nature Communications no. 5 2014.

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