Study of Optical and Structural Properties of β-(AlxGa1–x)2O3 Thin Films Grown by Spray Pyrolysis Technique-Reference-Cited by-同舟云学术

Study of Optical and Structural Properties of β-(AlxGa1–x)2O3 Thin Films Grown by Spray Pyrolysis Technique

Published:2024 Issue:2 Volume:6 Page:62-66
ISSN:2687-0568
Container-title:Reviews on Advanced Materials and Technologies
language:
Short-container-title:Rev. Adv. Mater. Technol.

Author:

,Zhang X.,Panov D.I.^ORCID, ,Spiridonov V.A.^ORCID, ,Bauman D.A.^ORCID, ,Romanov A.E.^ORCID,

Abstract

The work demonstrates the synthesis of thin films of β-(AlxGa1–x)2O3 by spray pyrolysis method. Temperature conditions for sol synthesis are determined to obtain thin films with a specified content of aluminum. The films are studied by scanning electron microscopy, energy-dispersive X-ray spectroscopy and optical spectroscopy. The aluminum content in the fabricated β-(AlxGa1–x)2O3 films is about 3.6 at.%. The optical band gap of the films is determined as 5.0 eV.

Publisher

ITMO University

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