Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS-Reference-Cited by-同舟云学术

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Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS

Published:2016 Issue:0 Volume:14 Page:87-91
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotech.

Author:

Akiba Shouta¹,Yamazaki Atsuko¹,Shirakura Daichi¹,Tomiyasu Bunbunoshin²,Owari Masanori¹²

Affiliation:

1. Institute of Industrial Science, The University of Tokyo

2. Environmental Science Center, The University of Tokyo

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

https://www.jstage.jst.go.jp/article/ejssnt/14/0/14_87/_pdf

Reference7 articles.

1. [1] A. Yamazaki, S. Akiba, B. Tomiyasu, and M. Owari, e-J. Surf. Sci. Nanotech. 13, 65 (2015).

2. [2] Z. Cheng, T. Sakamoto, M. Takahashi, Y. Kuramoto, M. Owari, and Y. Nihei, J. Vac. Sci. Technol. B 16, 2473 (1998).

3. [3] A. Delcorte, N. Médard, and P. Bertrand, Anal. Chem. 74, 4955 (2002).

4. [4] A. Delcorte, S. Yunus, N. Wehbe, N. Nieuwjaer, C. Poleunis, A. Felten, L. Houssiau, J. J. Pireaux, and P. Bertrand, Anal. Chem. 79, 3673 (2007).

5. [5] A. Prabhakaran, S. Yunus, N. Wehbe, P. Bertrand, and A. Delcorte, Surf. Interface Anal. 43, 74 (2011).

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