Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS-Reference-Cited by-同舟云学术

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Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Published:2015 Issue:0 Volume:13 Page:65-68
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotech.

Author:

Yamazaki Atsuko¹,Akiba Shouta¹,Tomiyasu Bunbunoshin²,Owari Masanori¹²

Affiliation:

1. Institute of Industrial Science, The University of Tokyo

2. Environmental Science Center, The University of Tokyo

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Reference13 articles.

1. [1] H. Satoh, M. Owari, and Y. Nihei, J. Vac. Sci. Technol. B6, 915 (1988).

2. [2] M. Owari, T. Sakamoto, M. Takahashi, Zh. H. Cheng, Y. Kuramoto, and Y. Nihei, J. Surf. Anal. 5, 356 (1999).

3. [3] Y. Morita and M. Owari, Appl. Surf. Sci. 255, 1052 (2008).

4. [4] T. Sakamoto, K. Shibata, K. Takanashi, M. Owari, and Y. Nihei, e-J. Surf. Sci. Nanotech. 2, 45 (2004).

5. [5] Y. Morita, A. Kuroda, T. Iwata, and M. Owari, Surf. Interface Anal. 42, 1622 (2010).

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Secondary ion mass spectrometry depth profiling of ultrathick films using an argon gas cluster source: Crater shape implications on the analysis area as a function of depth;Surface and Interface Analysis;2018-09-03

2. Angular Distribution of Secondary Ions under FIB-shave-off Condition -Toward Development of Three-Dimensional Secondary Ion Image System-;Journal of Surface Analysis;2017

3. Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS;E-J SURF SCI NANOTEC;2016

4. Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS;e-Journal of Surface Science and Nanotechnology;2016

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