Characterization of silicon surface preparation processes for advanced gate dielectrics
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Published:1999-05
Issue:3
Volume:43
Page:351-326
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ISSN:0018-8646
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Container-title:IBM Journal of Research and Development
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language:
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Short-container-title:IBM J. Res. & Dev.
Author:
Okorn-Schmidt H. F.
Subject
General Computer Science
Cited by
131 articles.
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