1. Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores;Journal of Micromechanics and Microengineering;2021-04-13
2. Diazonaphthoquinone Molecular Glass Photoresists: Patterning without Chemical Amplification;Chemistry of Materials;2007-06-27
3. Resists for X-ray Lithography;Encyclopedia of Materials: Science and Technology;2001
4. A diazoquinone positive photoresist for x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
5. Lithography;Fundamentals of Semiconductor Processing Technology;1995