Thermodynamic Analysis on the Codeposition of SiC-Si3 N4 Composite Ceramics by Chemical Vapor Deposition using SiCl4 -NH3 -CH4 -H2 -Ar Mixture Gases-Reference-Cited by-同舟云学术

Thermodynamic Analysis on the Codeposition of SiC-Si3 N4 Composite Ceramics by Chemical Vapor Deposition using SiCl4 -NH3 -CH4 -H2 -Ar Mixture Gases

Published:2012-12-12 Issue:3 Volume:96 Page:979-986
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

Xue Jimei¹,Yin Xiaowei¹,Ye Fang¹,Zhang Litong¹,Cheng Laifei¹

Affiliation:

1. Science and Technology on Thermostructure Composite Materials Laboratory; Northwestern Polytechnical University; No. 127, West Youyi Rd Xi'an 710072 Shaanxi China

Funder

Northwestern Polytechnical University

Natural Science Foundation of China

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.12115/fullpdf

Reference40 articles.

1. Phase Equilibria in the Si-C-N-O System and the Kinetic Analysis of Silicon Carbide Whisker Growth;Jha;J. Mater. Sci.,1993

2. Deposition of Silicon Carbonitride Films Using Methylsilazane;Du;Chem. Mater.,1989

3. Microstructure and Mechanical Properties of Si3N4/SiC Composites;Hirano;Mater. Lett.,1995

4. Fabrication, Mechanical Properties and Microstructure Analysis of Si3N4/SiC Nanocomposite;Cheong;Compos. A,1999

5. Dielectric and Infrared Properties of Silicon Carbide Nanopowders;Sun;Ceram. Int.,2002

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel synthesis from instability difference between SiC 3-C and 6-H crystal to form nanoparticles stems by alkali solution and its degrading various environmental pollutants;Ceramics International;2024-05

2. First-principles and thermodynamic analysis for gas phase reactions and structures of the SiC(0001) surface under conventional CVD and Halide CVD environments;Japanese Journal of Applied Physics;2021-07-26

3. Synthesis of monophase two‐dimensional α‐Si 3 N 4 nanoplatelets via an ionothermal route;International Journal of Applied Ceramic Technology;2021-04-24

4. Tailorable microwave absorption properties of RGO/SiC/CNT nanocomposites with 3D hierarchical structure;Ceramics International;2020-08

5. Generalized CVD Diagram of the Si–C–N–H–Не(Ar) System;Russian Journal of Inorganic Chemistry;2020-06