Epitaxial Pb(Zr,Ti)O3Thin Films on Flexible Substrates
Author:
Affiliation:
1. Materials Science Program; School of Mechanical, Industrial, & Manufacturing Engineering; Oregon State University; Corvallis; OR; 97331
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2011.04811.x/fullpdf
Reference15 articles.
1. Thin Film Piezoelectrics for MEMS;Trolier-McKinstry;J. Electroceram.,2004
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3. {100}-Textured, Piezoelectric Pb(Zr,Ti)O3 Thin Films for MEMS: Integration, Deposition and Properties;Ledermann;Sens. Actuators A,2003
4. Piezoelectric Properties of c-Axis Oriented Pb(Zr,Ti)O3 Thin Films;Kanno;Appl. Phys. Lett.,1997
5. Biaxially Textured IBAD-MgO Templates for YBCO-Coated Conductors;Arendt;MRS Bull.,2004
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