Orientation and phase mapping in the transmission electron microscope using precession-assisted diffraction spot recognition: state-of-the-art results

Author:

VILADOT D.1,VÉRON M.2,GEMMI M.3,PEIRÓ F.4,PORTILLO J.56,ESTRADÉ S.46,MENDOZA J.6,LLORCA-ISERN N.1,NICOLOPOULOS S.51

Affiliation:

1. CPCM Universitat de Barcelona; Facultat de Química, Departament de Ciencia de Materials i Enginyeria Metallúrgica; Barcelona Catalunya Spain

2. Laboratoire SIMaP; Grenoble INP - CNRS - UJF, Saint Martin d'Hères Cedex; France

3. Center for Nanotechnology Innovation@NEST; Istituto Italiano di Tecnologia; Pisa Italy

4. LENS, MIND-IN2UB; Departament d'Electrònica, Universitat de Barcelona; Barcelona Spain

5. NanoMEGAS SPRL; Brussels Belgium

6. Centres Científics i Tecnològics de la Universitat de Barcelona; Barcelona Catalunya, Spain

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Reference38 articles.

1. Improved accuracy in nano beam electron diffraction;Beche;J. Phys. Conf. Series.,2010

2. Pattern size dependence of grain growth in Cu interconnects;Brandstetter;Scripta Materialia.,2010

3. Confirmation of the domino-cascade model by LiFePO4/FePO4 precession electron diffraction;Brunetti;Chem. Mater.,2011

4. The effect of stress distribution on texture of Cu Damscene interconnects during annealing;Cho;Arch. Metall. Mater,2005

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