New pathways for improved quantification of energy-dispersive X-ray spectra of semiconductors with multiple X-ray lines from thin foils investigated in transmission electron microscopy
Author:
Affiliation:
1. Department of Electronic & Electrical Engineering; University of Sheffield; Mappin Street, Sheffield S1 3JD UK
2. now at: IMEC; Kapeldreef 75; B-3001 Leuven Belgium
Publisher
Wiley
Subject
Histology,Pathology and Forensic Medicine
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/jmi.12345/fullpdf
Reference30 articles.
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2. Quantitative analysis of thin specimens;Cliff;J. Microsc.,1975
3. Quantitative compositional analysis and strain study of InAs quantum wires with InGaAlAs barrier layers;Cui;J. Appl. Phys.,2009
4. Applicability of the differential X-ray absorption method to the determination of foil thickness and local composition in the analytical electron microscope;Horita;Philos. Mag. A,1989
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