Design Construction of Beam Structured Vertical Drive SMA Thin Film Actuator for Small Tactile Display-Reference-Cited by-同舟云学术

Design Construction of Beam Structured Vertical Drive SMA Thin Film Actuator for Small Tactile Display

Published:2008 Issue:4 Volume:128 Page:151-160
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Yoshikawa Wataru¹,Sasabe Akio²,Sugano Kouji¹,Tsuchiya Toshiyuki¹,Ishida Akira³,Tabata Osamu¹

Affiliation:

1. Graduate School of Engineering, Kyoto University

2. ROHM CO. LTD

3. National institute for materials science

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/128/4/128_4_151/_pdf

Reference47 articles.

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3. (3) Y. Yee, H-J. Nam, S-H. Lee, J. U. Bu, Y-S. Jeon, and S-M. Cho : “PZT Actuated Micromirrors for Nano-Tracking of Laser Beam for High-Density Optical Data Storage”, Proceedings of The 13th International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan, pp. 435-440 (2000)

4. (4) A. Jain, H. Qu, S. Todd, and H. Xie : “A thermal bimorph micromirror with large bi-directional and vertical actuation”, Sensors and Actuators, A 122, pp. 9-15 (2005)

5. (5) H. Matoba, T. Ishikawa, C.-J. Kim, and R. S. Muller : “A Bistable Snapping Microactuator”, Proceedings of the IEEE Workshop on Micro Electro Mechanical Systems, Hilton Head, SC, pp. 45-50 (1994)

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