Author:
Mineta Takashi,Haga Yoichi
Reference92 articles.
1. P. Krulevitch, A.P. Lee, P.B. Ramsey, J.C. Trevino, J. Hamilton, M.A. Northrup: Thin film shape memory alloy microactuators, J. Microelectromech. Syst. 5(4), 270–281 (1996)
2. K. Otsuka C.M. Wayman: Shape Memory Materials (Cambridge University Press, Cambridge, 1998)
3. J.A. Walker, K.J. Gabriel: Thin-film processing of TiNi shape memory alloy, Sens. Actuators, A21–A23, 243–246 (1990)
4. K. Kuribayashi, M. Yoshitake, S. Ogawa: Reversible SMA Actuator for Micron Sized Robot, Proceedings of the IEEE Micro Electro Mechanical Systems. MEMS, pp. 217–221 (Napa Valley, CA, USA, 1990)
5. A.D. Johnson: Vacuum-deposited TiNi shape memory film: Characterization and applications in microdevices, J. Micromech. Microeng. 34–41 (1991)
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