Three Dimensional Fabrication by Inclined Rotary Exposure
Author:
Affiliation:
1. Faculty of Science and Technology, Department of Applied Physycs and Physico-Imformatics, Keio University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/126/6/126_6_222/_pdf
Reference3 articles.
1. (1) K. Okada, F. Ohira, G. Hashiguchi, M. Hosogi, and Y. Mihara : “Fabrication of Fresnel lens shape using UV light exposure technology with tilting rotary stage”, Optical MEMS 2004 proc., pp. 146-147 (2004)
2. (2) S. Shoji : “Polymer-MEMS and Its Applications”, IEEJ Trans. SM, Vol. 124, No. 10, pp. 349-353 (2004) (in Japanese)
3. (3) R. Mori, K. Hanai, and Y. Matsumoto : “Three Dimensional Micro Fabrication of Photoresist and Resin Materials by Using Gray-scale Lithography and Molding”, IEEJ Trans. SM, Vol. 124, No. 10 pp. 359-363 (2004) (in Japanese)
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1. Angled Exposure Method for Pattering on Three-Dimensional Structures;Japanese Journal of Applied Physics;2007-09-20
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