Polymer-MEMS and Its Applications

Author:

Shoji Shuichi1

Affiliation:

1. Waseda University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference25 articles.

1. (2) P. Renaud, S. Metz, S. Jiguet, and A. Bertsch : “Composite Photoplumer Microstructures: From Planar to 3D Device”, 12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems, Vol. 2, pp. 991-994 (2003)

2. The LIGA technique-what are the new opportunities

3. (5) J.-W. Choi, S. Kim, and R. Trichur, et. al. : “A Plastic Micro Injection Molding Technique using Replaceable Mold-Disks for Disposable Microfluidc Systems and Biochips”, 5th Int. Conf. On Micro Total Analysis Systems, pp. 411-412 (2001)

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