Electrostatic Controlled Linear Inchworm Actuator

Author:

Konishi Satoshi1,Munechika Masaki1,Sawai Takuhiko1,Yoshifuji Kenji1

Affiliation:

1. Ritsumeikan University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference14 articles.

1. (1) M. Lutwyche, C. Andreoli, G. Binning, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, and P. Vertiger: “Microfabrication and Parallel Operation of 5×5 2D AFM Cantilever Arrays for Data Storage and Imaging”, Proc. IEEE MEMS, pp. 8-11 (1998)

2. (3) T. Akiyama and K. Shono: “Controlled stepwise motion on polysilicon microstructures”, J. Microelectromechanical Syst., vol. 2, No. 3, pp. 106-110 (1993)

3. (4) N. Osakabe, M. Kurosawa, T. Higuchi, and O. Shinoura: “Surface Acoustic Wave Linear Motor using Silicone Slider”, Proc. IEEE MEMS, pp. 390-395 (1998)

4. (5) S. Konishi, K. Ohno, and M. Munechika: “Parallel Linear Actuator System with High Accuracy and Large Stroke”, Sensors and Actuators, Vol. 83/1-3, pp. 60-66 (2001)

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