Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications
Author:
Affiliation:
1. Sakamoto Electric Mfg. Co. Ltd
2. The Graduate School of Information, Production and Systems, Waseda University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/127/7/127_7_337/_pdf
Reference9 articles.
1. Recent Advances and Prospects of Precise 3D Microfabrication with a High Aspect Ratio
2. Fabrication of Quartz Microcapillary Electrophoresis Chips Using Plasma Etching
3. Microfabrication of a Planar Absorbance and Fluorescence Cell for Integrated Capillary Electrophoresis Devices
4. Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Devices
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