Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Devices
Author:
Publisher
The Society of Instrument and Control Engineers
Link
https://www.jstage.jst.go.jp/article/sicetr1965/23/12/23_12_1233/_pdf
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures;Micromachines;2024-06-14
2. Etching Rate Analysis Model Based on Quartz Bond Angle Characteristics;Micromachines;2024-06-08
3. Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching;Microelectronic Engineering;2020-07
4. Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz;Sensors and Actuators A: Physical;2017-04
5. A Method for the Determination of Ferrite Grains with a Surface Normal close to the (111) Orientation in Cold Rolled Steel Samples with Color Etching and Optical Microscopy;Materials Science Forum;2015-02
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