Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz-Reference-Cited by-同舟云学术

Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz

Published:2017-04 Issue: Volume:256 Page:24-34
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhang Hui,Xing Yan,Li Yuan,Gosálvez Miguel A.,Qiu Xiaoli

Funder

National Natural Science Foundation of China

Department of Science and Technology

Prospective study of Jiangsu Province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference48 articles.

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