2D Analysis and simulation of quartz crystal etch penetration by revisiting a previous geometric method-Reference-Cited by-同舟云学术

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2D Analysis and simulation of quartz crystal etch penetration by revisiting a previous geometric method

Published:2023-12 Issue: Volume: Page:114901
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhao Xinjia,Zhao Meng,Ji Jing,Lv Chengbao,Song Shuanqiang

Funder

Natural Science Foundation of Shanxi Province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference41 articles.

1. Development of an effective method to reduce mechanical coupling error in a micro quartz tuning fork gyroscope;Bai;Sensor. Actuat. A- Phys,2021

2. MEMS resonators for frequency reference and timing applications;Wu;J. Microelectromech. S.,2020

3. Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures;Xing;New. J. Phys,2007

4. Etch rates of crystallographic planes in Z-cut;Rangsten;quartz - experiments and simulation, J. Micromech. Micro.,1999

5. Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz;Zhang;Sensor Actuat. A- Phys,2017

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