Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication-Reference-Cited by-同舟云学术

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Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication

Published:2023-03-28 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Sirota M.¹,Lipavsky B.¹,Nuttman D.¹,Melech N.²,HaLevy O.²,Krylov S.²

Affiliation:

1. Israel Aerospace Industries,Engineering Department, TAMAM,Yehud,Israel

2. Tel-Aviv University,School of Mechanical Engineering, Faculty of Engineering,Tel-Aviv,Israel

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10103931/10103798/10103805.pdf?arnumber=10103805

Reference15 articles.

1. Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

2. Surface electrode configurations for quartz MEMS double‐ended tuning fork resonator

3. Three-electrode self-actuating self-sensing quartz cantilever: Design, analysis, and experimental verification

4. Laser-Assisted Wet Etching of Quartz Crystal Resonators

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1. Compliant Parallel Motion Linkage Amplification Mechanism for Resonant Force/Acceleration Sensing;IEEE Sensors Journal;2023-08-15

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