Surface electrode configurations for quartz MEMS double‐ended tuning fork resonator-Reference-Cited by-同舟云学术

Surface electrode configurations for quartz MEMS double‐ended tuning fork resonator

Published:2013-01 Issue:1 Volume:8 Page:52-55
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro & Nano Letters

Author:

Liang Jinxing¹,Chai Yanli²,Meng Guangchan¹,Chen Xueying¹

Affiliation:

1. Key Laboratory of Micro‐Inertial Instrument and Advanced Navigation TechnologyMinistry of EducationSchool of Instrument Science and EngineeringSoutheast UniversityNanjing210096People's Republic of China

2. School of Electrical Engineering and AutomationJiangsu Normal UniversityXuzhou221116People's Republic of China

Funder

Natural Science Foundation of Jiangsu Province

Ministry of Education of the People's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2012.0621

Reference18 articles.

1. Resonator sensors-a review

2. Survey of quartz bulk resonator sensor technologies

3. AzginK.RoC.TorrentsA.AkinT.ValdevitL.: ‘A resonant tuning fork force sensor with unprecedented combination of resolution and range’.Proc. MEMS 2011 pp.545–548

4. Resonant force sensor using a PLL electronic;Barthod C.;Sens. Actuators A,2003

5. Development of silicon and quartz based MEMS high precision accelerometers;Kal S.;Indian J. Pure Appl. Phys,2007

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