Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
Author:
Affiliation:
1. NTT Microsystem Integration Labs.
2. NTT Basic Research Labs.
3. NTT Advanced Technology Corp.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/126/1/126_1_14/_pdf
Reference12 articles.
1. Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip
2. Vapor phase anti-stiction coatings for MEMS
3. MEMS fingerprint sensor immune to various finger surface conditions
4. Fabrication of Optical Microelectromechanical-System Switches Having Multilevel Mirror-Drive Electrodes
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