Evaluation of Characteristics in VOx Thin Films Obtained by Reduced-Pressure Firing of Precursor Films Fabricated by MOD

Author:

Uchida Takashi1,Kasai Hiroyuki1,Tachiki Takashi1

Affiliation:

1. Department of Electrical and Electronic Engineering, National Defense Academy

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Reference22 articles.

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3. (3) P. L. Richards : “Bolometers for infrared and millimeter waves”, J. Appl. Phys., Vol. 76, No. 1, pp. 1-24 (1994)

4. (4) S. M. Wentworth and D. P. Neikirk : “Far-Infrared Microbolometers Made with Tellurium and Bismuth”, Electron. Lett., Vol. 25, No. 23, pp. 1558-1560 (1989)

5. (5) S. F. Gilmartin, K. Arshak, D. Collins, B. Lane, D. Bain, S. B. Newcomb, B. McCarthy, and A. Arshak : “Titanium Hydride Formation in Current-Biased Titanium Microbolometer and Nanobolometer Devices”, Sensors & Transducers J., Vol. 103, No. 4, pp. 83-95 (2009)

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