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Fabrication of V1-x Ti x O2 thin films by metal-organic decomposition using carbon thermal reduction

  • Published:2019-06-28 Issue:7 Volume:58 Page:075506
  • ISSN:0021-4922
  • Container-title:Japanese Journal of Applied Physics
  • language:
  • Short-container-title:Jpn. J. Appl. Phys.

Author:

Hai Van Nhu,Kawahara Masami,Samura Tsuyoshi,Tachiki Takashi,Uchida Takashi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of V1−x Ti x O2 microbolometers on Si3N4/SiO2 membranes;Japanese Journal of Applied Physics;2023-12-27

2. Evaluation of V<sub>1</sub><sub>-<i>x</i></sub>Cr<i><sub>x</sub></i>O<sub>2</sub> Thin Films Fabricated by MOD;IEEJ Transactions on Fundamentals and Materials;2023-03-01

3. Characterization of the VOx Thin Films Grown on C-plane Sapphire Substrates by MOD;IEEJ Transactions on Fundamentals and Materials;2021-05-01

4. Investigation of fabrication conditions for VO 2 thin films by MOD using carbon thermal reduction;Electronics and Communications in Japan;2021-03-07

5. Evaluation of V0.75Ti0.25O2 Bolometer Thin Films Fabricated by MOD;IEEJ Transactions on Fundamentals and Materials;2021-03-01
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