Evaluation of Characteristics in VOx Microbolometer Fabricated by MOD on Si3N4/SiO2 Membrane
Author:
Affiliation:
1. National Defense Academy
2. Tokyo Institute of Technology
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
https://www.jstage.jst.go.jp/article/ieejfms/138/9/138_471/_pdf
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3. (3) P. L. Richards : “Bolometers for infrared and millimeter waves”, J. Appl. Phys., Vol. 76, No. 1, pp. 1-24 (1994)
4. (4) D. B. Rutledge, S. E. Schwarz, T. L. Hwang, D. J. Angelakos, K. K. Mei, and S. Yokota : “Antenna and Waveguide for Far-Infrared Integrated Circuits”, IEEE J. Quantum Electron., Vol. QE-16, No. 5, pp. 508-516 (1980)
5. (5) K. Hayashi, T. Tachiki, T. Uchida, T. Furuya, T. Idehara, and Y. Yasuoka : “Detection Properties of Thin-Film Slot-Antenna-Coupled GaAs Schottky Barrier Diodes”, Jpn. J. Appl. Phys., Vol. 48, pp. 081103-1-5 (2009)
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