1. (1) H. Butler: “Position Control in Lithographic Equipment”, IEEE Control Systems, Vol. 31, pp. 28-47 (2011)
2. (2) T. Oomen, R. van Herpen, S. Quist, M. van de Wal, O. Bosgra, and M. Steinbuch: “Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage”, IEEE Trans. on Control Systems Technology, Vol. 22, pp. 102-118 (2014)
3. (3) Y. Choi and D. Gweon: “A High-Precision Dual-Servo Stage Using Halbach Linear Active Magnetic Bearings”, IEEE/ASME Transactions on Mechatronics, Vol. 16, pp. 925-931 (2013)
4. (4) J. Yang and X. Pei: “Seek time and trajectories of time optimal control for a dual stage optical disk drive actuator”, IEEE Trans. Magnetics, Vol. 32, No. 5, pp. 3857-3859 (1996)
5. (5) K. Mori, T. Munemoto, H. Otsuki, Y. Yamaguchi, and K. Akagi: “A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density”, IEEE Magnetics, Vol. 27, No. 6, pp. 5298-5300 (1991)