Evolution from MEMS-based Linear Drives to Bio-based Nano Drives
Author:
Affiliation:
1. CIRMM, Institute of Industrial Science, The University of Tokyo
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering
Link
https://www.jstage.jst.go.jp/article/ieejias/126/10/126_10_1314/_pdf
Reference13 articles.
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2. (2) H. Toshiyoshi and H. Fujita: “Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix”, IEEE J. Microelectromechanical Systems, Vol. 5, pp. 231-237 (1996-5)
3. (3) H. Toshiyoshi and H. Fujita: “Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix”, IEEE J. Microelectromechanical Systems, Vol. 5, pp. 231-237 (1996-5)
4. (4) Y.-K. Kim, M. Katsurai, and H. Fujita: “A levitation-type linear synchronous microactuator using the Meissner effect of high-Tc superconductors”, Sensors & Actuators A, Vol. 29, pp. 143-150 (1991)
5. (5) T. Iizuka and H. Fujita: “A Micro Conveyance Actuator based on Superconducting Magnetic Levitation”, T. IEE Japan, Vol. 119-E, No. 8/9, pp. 417-423 (1999-8)
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