Affiliation:
1. The University of Tokyo
2. Hitachi Cable, Ltd.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Cited by
5 articles.
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1. Evolution from MEMS-based Linear Drives to Bio-based Nano Drives;IEEJ Transactions on Industry Applications;2006
2. Bulk micromachined tunneling tips integrated with positioning actuators;Journal of Microelectromechanical Systems;2005-02
3. Micromachined Scanning Tunneling Microscopes and Nanoprobes;Micromachines as Tools for Nanotechnology;2003
4. Micromachines for nanoscale science and technology;Nanotechnology;1999-01-01
5. Characterization of bulk micromachined tunneling tip integrated with positioning actuator;Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)