1. IC-processed micro motors: design, technology, and testing;Tai;Proc. IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, UT, U.S.A.,1989
2. In situ measurement of friction and wear in integrated polysilicon micro-mechanisms;Gabriel;Abstr. 5th Int. Conf. Solid-State Sensors and Actuators (Transducers '89) and Eurosensors III, Montreux, Switzerland,1989
3. Frictional study of IC-processed micromotors;Tai;Abstr. 5th Int. Conf. Solid-State Sensors and Actuators (Transducers '89) and Eurosensors III, Montreux, Switzerland,1989
4. Magnetically levitated micro-machines;Perline;Proc. IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, U.S.A.,1987
5. A superconducting actuator using the Meissner effect;Kim;Sensors and Actuators,1989