Characteristics of a Ferromagnetic-Enhanced Inductively-Coupled Plasma by an Internal Linear Antenna-Reference-Cited by-同舟云学术

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Characteristics of a Ferromagnetic-Enhanced Inductively-Coupled Plasma by an Internal Linear Antenna

Published:2008-02-15 Issue:2 Volume:52 Page:313-317
ISSN:0374-4884
Container-title:Journal of the Korean Physical Society
language:en
Short-container-title:J. Korean Phy. Soc.

Author:

Lim Jong Hyeuk,Kim Kyong Nam,Park Jung Kyun,Yeom Geun Young

Publisher

Korean Physical Society

Subject

General Physics and Astronomy

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ferromagnetic enhanced inductive plasma sources;Journal of Physics D: Applied Physics;2013-06-25

2. Electrical and plasma parameters of ICP with high coupling efficiency;Plasma Sources Science and Technology;2011-02-17

3. Effect of Capacitor Installed in Series With a Ferrite-Enhanced Internal Linear-Type Antenna on the Properties of an Inductively Coupled Plasma;IEEE Transactions on Plasma Science;2010-06

4. Roles of F and O Radicals and Positive Ions in a SF6/O2 Plasma in Forming Deep Via Structures;Journal of the Korean Physical Society;2009-05-15

5. Effects of Pulsating Bias Power on Deep Si Vias Etching;Journal of the Korean Physical Society;2009-03-14

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