Possibilities for projection x-ray lithography using holographic optical elements
Author:
Publisher
The Optical Society
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1. Aspects of nanometer scale imaging with extreme ultraviolet (EUV) laboratory sources;Opto-Electronics Review;2012-01-01
2. Nanometer scale imaging with table top extreme ultraviolet sources;17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics;2010-09-24
3. Extreme ultraviolet lithography with table top lasers;Progress in Quantum Electronics;2010-07
4. Coherent imaging nano-patterning with extreme ultraviolet laser illumination;Conference on Lasers and Electro-Optics/International Quantum Electronics Conference;2009
5. Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-11
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