Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers-Reference-Cited by-同舟云学术

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Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers

Published:2010-02-17 Issue:6 Volume:49 Page:1007
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Mitsuishi Ikuyuki,Ezoe Yuichiro,Koshiishi Masaki,Mita Makoto,Maeda Yoshitomo,Yamasaki Noriko Y.,Mitsuda Kazuhisa,Shirata Takayuki,Hayashi Takayuki,Takano Takayuki,Maeda Ryutaro

Publisher

The Optical Society

Reference5 articles.

1. Status of x-ray optics development for the XEUS Mission

2. X-ray focusing with Wolter microchannel plate optics

3. Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers

4. Micromachined X-ray collector for space astronomy

5. The first light of a single-stage MEMS x-ray optic

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stiffener and staggered-square honeycomb structure design for lobster eye x ray micro pore optics;Optics Letters;2024-07-29

2. Improvement of imaging performance of silicon micropore X-ray optics by ultra long-term annealing;Optics Express;2022-06-27

3. Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching;Applied Optics;2019-06-28

4. Evaluation of alignment error of micropore X-ray optics caused by hot plastic deformation;Japanese Journal of Applied Physics;2018-05-18

5. X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching;Japanese Journal of Applied Physics;2017-05-10

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