Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching-Reference-Cited by-同舟云学术

Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching

Published:2019-06-28 Issue:19 Volume:58 Page:5240
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Fukushima Aoto,Fujitani Maiko,Ishikawa Kumi,Numazawa Masaki,Ishi Daiki,Otsubo Ryota,Nagatoshi Hikaru,Suzuki Hikaru,Yuasa Tatsuya,Ohashi Takaya,Mitsuda Kazuhisa,Ezoe Yuichiro

Funder

Ministry of Education, Culture, Sports, Science and Technology (MEXT)

Japan Society for the Promotion of Science (JSPS)

Toray Science Foundation

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference20 articles.

1. Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen

2. On the concentration, focusing, and collimation of x‐rays and neutrons using microchannel plates and configurations of holes

3. X-ray focusing with Wolter microchannel plate optics

4. LOBSTER-ISS: an imaging x-ray all-sky monitor for the International Space Station

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