Author:
Ezoe Yuichiro,Koshiishi Masaki,Mita Makoto,Maeda Yoshitomo,Mitsuda Kazuhisa,Osawa Takeyuki,Suzuki Masaki,Hoshino Akio,Ishisaki Yoshitaka,Takano Takayuki,Maeda Ryutaro
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Micropore X-ray optics using anisotropic wet etching of (110) silicon wafers;Ezoe;Appl. Opt.,2006
2. Design and fabrication of a MEMS X-ray optic using anisotropic wet etching of Si wafers;Koshiishi,2006
3. Silicon micro-pore X-ray optics;Ezoe;Nucl. Instr. Meth.,2007
4. Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication;Ohwada;Sens. Actuators,1998
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