Optical inspection of nanoscale structures using a novel machine learning based synthetic image generation algorithm
Author:
Funder
Cisco Systems
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference26 articles.
1. 9nm node wafer defect inspection using three-dimensional scanning, a 405nm diode laser, and a broadband source
2. Defect detection on semiconductor wafer surfaces
3. Defect Detection in SEM Images of Nanofibrous Materials
4. Deep sub-wavelength metrology for advanced defect classification
5. Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy
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