Hyperspectral confocal microscopy in the short-wave infrared range

Abstract

We demonstrate hyperspectral confocal microscopy in the short-wave infrared (SWIR) range of 1100–1600 nm using a wavelength-scanning laser in tandem with laser scanning confocal microscopy. Confocal microscopy in the SWIR range allows for high-resolution inspection of an integrated circuit (IC) chip, while hyperspectral imaging, together with a chemometric analysis, enables us to identify functional circuit block groups in the acquired image. With the extended capability, the developed instrument can be potentially used for inline inspection and non-invasive failure analysis of IC chips.