Highly efficient ultra-low blaze angle multilayer grating
Author:
Funder
U.S. Department of Energy
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference14 articles.
1. Highly efficient blazed grating with multilayer coating for tender X-ray energies
2. Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
3. Development of an EUVL collector with infrared radiation suppression
4. Extreme-ultraviolet plasma source with full, infrared to vacuum ultraviolet spectral filtering, and with power recycling
5. Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra-precise gratings at Helmholtz Zentrum Berlin
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4. Advanced low blaze angle x-ray gratings via nanoimprint replication and plasma etch;Optics Express;2023-07-26
5. Fabrication of low blaze angle gratings by replication and plasma etch;Advances in X-Ray/EUV Optics and Components XVII;2022-10-04
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