Diffractive phase-shift lithography photomask operating in proximity printing mode
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference23 articles.
1. Improving resolution in photolithography with a phase-shifting mask
2. Extending the Lifetime of Optical Lithography Technologies with Wavefront Engineering
3. High aspect ratio patterning with a proximity ultraviolet source
4. Optimization of partial coherence for half-micron i-line lithography
5. Proximity printing of chrome masks
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2. Phase-only Fresnel Hologram Generation From Halftone Images;Digital Holography and Three-Dimensional Imaging 2019;2019
3. Research on encoding multi-gray-scale phase hologram and wavefront reconstruction;Applied Optics;2016-03-30
4. Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL);Microelectronic Engineering;2015-08
5. High-resolution proximity lithography for nano-optical components;Microelectronic Engineering;2015-01
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