In situ monitoring technique for fabrication of high-quality diffraction gratings
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference4 articles.
1. Optical lithography
2. Generation of periodic surface corrugations
3. Low threshold operation of a GaAlAs/GaAs distributed feedback laser with double channel planar buried heterostructure
4. Fabrication of chirped gratings on GaAs optical waveguides
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3. In situ monitoring for development of rectangular photoresist gratings on transparent substrates;Applied Optics;2010-01-15
4. In situ monitoring during ion-beam etching of multilayer dielectric gratings: simulation and experiment;SPIE Proceedings;2005-02-07
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