Controlling the duty cycle of holographic crossed gratings by in situ endpoint detection during development
Author:
Funder
National Natural Science Foundation of China (NSFC)
Publisher
The Optical Society
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2. The forming mechanism of microstructure of crossed holographic photoresist grating;Holography, Diffractive Optics, and Applications VIII;2018-11-02
3. Design and fabrication of crossed gratings with multiple zero-reference marks for planar encoders;Measurement Science and Technology;2018-01-18
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