Design and fabrication of crossed gratings with multiple zero-reference marks for planar encoders
Author:
Funder
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aa9d5e/pdf
Reference31 articles.
1. Measurement technologies for precision positioning
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