Fabrication of an improved gray-scale mask for refractive micro- and meso-optics
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference5 articles.
1. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
2. General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask
3. Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass
4. Adapting existing e-beam writers to write HEBS-glass gray-scale masks
5. Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Maskless fabrication of three-dimensional microstructures with high isotropic resolution: practical and theoretical considerations;Applied Optics;2011-05-24
2. A dual-directional light-control film with a high-sag and high-asymmetrical-shape microlens array fabricated by a UV imprinting process;Journal of Micromechanics and Microengineering;2008-08-22
3. Two-beam-current method for e-beam writing gray-scale masks and its application to high-resolution microstructures;Applied Optics;2008-06-04
4. Fabrication of long hexagonal micro-lens array by applying gray-scale lithography in micro-replication process;Optics Communications;2007-02
5. Optimal use of analog and binary lithography for planar-integrated free-space optics fabrication;Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing;2004
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