Study of wet and dry etching processes for antimonide-based photonic ICs
Author:
Publisher
The Optical Society
Subject
Electronic, Optical and Magnetic Materials
Reference15 articles.
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2. Performance evaluation of GaSb/AlGaAs based high electron mobility transistors;Mohapatra,2011
3. High-speed and high-power GaSb based photodiode for 2.5 µm wavelength operations;Chao,2016
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