Fabrication of Differently Shaped Polymeric Nanoneedle Arrays via Multistep Plasma Etching Using Silica Microparticles as Masks-Reference-Cited by-同舟云学术

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Fabrication of Differently Shaped Polymeric Nanoneedle Arrays via Multistep Plasma Etching Using Silica Microparticles as Masks

Published:2021-07-22 Issue:9 Volume:42 Page:1204-1209
ISSN:1229-5949
Container-title:Bulletin of the Korean Chemical Society
language:en
Short-container-title:Bull. Korean Chem. Soc.

Author:

Lee Dong‐Hyun¹,Park Hyung Joon¹,Park Yong Gi Cha¹,Lee Kyu Back¹²³

Affiliation:

1. Department of Interdisciplinary Bio/Micro System Technology College of Engineering, Korea University Seoul 02841 Republic of Korea

2. Interdisciplinary Program in Precision Public Health College of Health Science, Korea University Seoul 02841 Republic of Korea

3. Department of Biomedical Engineering College of Health Science, Korea University Seoul 02841 Republic of Korea

Funder

Samsung

Publisher

Wiley

Subject

General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/bkcs.12343

Reference25 articles.

1. Production and Storage of Energy with One-Dimensional Semiconductor Nanostructures

2. Study of wet and dry etching processes for antimonide-based photonic ICs

3. Low-power, low-pressure reactive-ion etching process for silicon etching with vertical and smooth walls for mechanobiology application

4. Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force

5. Fabrication of a Microneedle/CNT Hierarchical Micro/Nano Surface Electrochemical Sensor and Its In-Vitro Glucose Sensing Characterization

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