Standing-wave interferometer based on single-layer SiO_2 nano-sphere scattering
Author:
Funder
Ministry of Science and Technology, Taiwan (MOST)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Heterodyne interferometric system with subnanometer accuracy for measurement of straightness
2. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics
3. An optical standing-wave interferometer for displacement measurements
4. Standing wave detection and interferometer application using a photodiode thinner than optical wavelength
5. Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers
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1. Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique;Optics Letters;2022-09-28
2. Development of a coplanar grating interferometer for displacement and angle measurements;Optics and Photonics for Advanced Dimensional Metrology II;2022-05-20
3. Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement;Sensors;2021-03-05
4. Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement;Optics & Laser Technology;2020-04
5. Polarization-standing-wave interferometer for displacement measurement;Optics & Laser Technology;2019-04
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