Polarization-standing-wave interferometer for displacement measurement
Author:
Funder
Ministerio de Ciencia y Tecnología
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
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2. High displacement resolution encoder by using triple grating combination interferometer;Hsu;Opt. Laser Technol.,2018
3. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution;Lee;Sensor. Actuat. A-Phys.,2007
4. Polarization interferometer;Takasaki;Appl. Opt.,1969
5. Development of an angular displacement measurement by birefringence heterodyne interferometry;Chen;Smart Sci.,2015
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