Micro and nano dual-scale structures fabricated by amplitude modulation in multi-beam laser interference lithography
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference17 articles.
1. Interference lithography: a powerful tool for fabricating periodic structures
2. Laser interference lithography as a new and efficient technique for micropatterning of biopolymer surface
3. Nanostructures and Functional Materials Fabricated by Interferometric Lithography
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5. Plasmonic Periodic Nanodot Arrays via Laser Interference Lithography for Organic Photovoltaic Cells with >10% Efficiency
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