Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet–soft-x-ray region
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Publisher
The Optical Society
Reference12 articles.
1. Optical constants for thin films of C, diamond, Al, Si, and CVD SiC from 24 Å to 1216 Å
2. Reflectance and total photoelectric yield measurements of silicon wafers in the XUV spectral range
3. Absolute photoabsorption measurements of Mg, Al, and Si in the soft-x-ray region below theL2,3edges
4. Cleaning of optical surfaces with photogenerated reactants
5. An S/XPS study of hydrogen terminated, ordered silicon (100) and (111) surfaces prepared by chemical etching
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